JPH0273633U - - Google Patents
Info
- Publication number
- JPH0273633U JPH0273633U JP15288288U JP15288288U JPH0273633U JP H0273633 U JPH0273633 U JP H0273633U JP 15288288 U JP15288288 U JP 15288288U JP 15288288 U JP15288288 U JP 15288288U JP H0273633 U JPH0273633 U JP H0273633U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- developer
- developer tank
- tank
- introduction part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15288288U JPH0273633U (en]) | 1988-11-24 | 1988-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15288288U JPH0273633U (en]) | 1988-11-24 | 1988-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273633U true JPH0273633U (en]) | 1990-06-05 |
Family
ID=31428215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15288288U Pending JPH0273633U (en]) | 1988-11-24 | 1988-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273633U (en]) |
-
1988
- 1988-11-24 JP JP15288288U patent/JPH0273633U/ja active Pending
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